Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2002
ISSN: 0924-4247
DOI: 10.1016/s0924-4247(02)00202-9